Papa SiC mō te paninga kiriata CVD

Te Whakatakotoranga Kohu Matū

Ko te waikura matū whakapūmau mamaoa (CVD) he tukanga tipu rārangi e whakapūmau ana te hau matūmua i tētahi kiriata angiangi ki runga i tētahi wafer i roto i tētahi tauhohenga. He iti te pāmahana o te tukanga tipu, ā, he nui ake te tere tipu ina whakaritea kiwaikura weraKa puta ake hoki he paparanga silicon dioxide angiangi rawa atu nā te mea ka waiho te kiriata, kaua e whakatupuria. Ka puta mai i tēnei tukanga he kiriata he ātete hiko teitei, he mea tino pai mō te whakamahi i roto i ngā IC me ngā taputapu MEMS, me ētahi atu tono maha.

Ka mahia te waikura whakatakoto kohu matū (CVD) ina hiahiatia he paparanga o waho, engari kāore pea e taea te waikura i te papa silicon.

Te tipu o te taunga o te kohu matū:

Ka puta te tipu o te CVD ina whakaurua he hau, he kohu rānei (te pūmua) ki roto i tētahi tauhohenga pāmahana iti, kei reira ngā papa e whakaritea ana kia poutū, kia whakapae rānei. Ka neke te hau i roto i te pūnaha, ā, ka tohatoha ōrite puta noa i te mata o ngā papa. I te nekenga o ēnei pūmua i roto i te tauhohenga, ka tīmata ngā papa ki te mimiti i a rātou ki runga i tō rātou mata.

Kia horapa ōrite ngā matū mua puta noa i te pūnaha, ka tīmata ngā tauhohenga matū i te mata o ngā papa. Ka tīmata ēnei tauhohenga matū hei moutere, ā, i te haere tonu o te tukanga, ka tipu ngā moutere ka hanumi hei hanga i te kiriata e hiahiatia ana. Ka hangaia e ngā tauhohenga matū he hua rua i runga i te mata o ngā papa, ka horapa puta noa i te paparanga rohe ka rere atu i te tauhohenga, ka waiho ko ngā papa anake me tō rātou paninga kiriata kua whakatakotoria.

Pikitia 1

Ngā Painga o te Whakatakotoranga Kohu Matū:

• Te tukanga tipu i te pāmahana iti.
• Tere te tere o te whakatakotoranga (ina koa ko te APCVD).
• Kāore e hiahiatia he papa hanga silicon.
• He pai te hipoki i ngā takahanga (ina koa ko te PECVD).

Pikitia 2
Te whakatakoto i te hauhā silicon me te tipu

Mō ētahi atu pārongo e pā ana ki te whakatakotoranga kohu matū, ki te tono utu rānei, tēnāWHAKAPĀ MAI KI TE SVMi tēnei rā ki te kōrero ki tētahi o tā mātou tīma hokohoko.

Ngā momo CVD

LPCVD

Ko te whakatakotoranga kohu matū pēhanga iti he tukanga whakatakotoranga kohu matū paerewa, kāore he pēhanga. Ko te rerekētanga nui i waenga i te LPCVD me ētahi atu tikanga CVD ko te pāmahana whakatakotoranga. Ka whakamahia e te LPCVD te pāmahana teitei rawa atu hei whakatakotoranga kiriata, i te nuinga o te wā neke atu i te 600°C.

Mā te taiao pēhanga iti ka hangaia he kiriata tino ōrite, he tino parakore, he kaha ki te whakaputa anō, ā, he ōrite hoki. Ka mahia tēnei i waenga i te 10 – 1,000 Pa, ko te pēhanga rūma paerewa ia he 101,325 Pa. Ko te pāmahana te mea e whakatau ana i te matotoru me te parakore o ēnei kiriata, ā, ko te pāmahana teitei ake ka hua ake he kiriata matotoru ake, he parakore ake.

• Ngā kiriata noa kua whakatakotoria:polysilicon, ngā waikura kua tāpirihia, me ngā waikura kāore i tāpirihia,ngā nitride.

PECVD

Ko te whakatakotoranga matū whakarei ake i te plasma he tikanga whakatakotoranga kiriata iti-mahana, teitei-kiato. Ka puta te PECVD i roto i te tauhohenga CVD me te tāpiri i te plasma, he hau kua whaka-katotehia te āhua me te nui o te irahiko kore utu (~50%). He tikanga whakatakotoranga pāmahana iti tēnei e puta ana i waenga i te 100°C – 400°C. Ka taea te mahi i te PECVD i ngā pāmahana iti nā te mea ka wehea ngā hau tauhohe e te kaha mai i ngā irahiko kore utu hei hanga i tētahi kiriata ki runga i te mata o te papa.

E rua ngā momo parāma e whakamahia ana i tēnei tikanga whakatakoto:

1. Mātao (kore-wera): he teitei ake te pāmahana o ngā irahiko i ngā matūriki me ngā katote kūpapa. Ka whakamahia e tēnei tikanga te pūngao o ngā irahiko mā te whakarerekē i te pēhanga i roto i te rūma whakatakotoranga.
2. Te Wera: he rite te pāmahana o ngā irahiko ki ngā matūriki me ngā katote i roto i te rūma whakatakotoranga.

I roto i te rūma whakatakotoranga, ka tukuna te ngaohiko auau-reo irirangi i waenga i ngā irahiko i runga ake me raro i te anga. Ka utua e tēnei ngā irahiko, ā, ka noho tonu i roto i te āhua whakaoho kia taea ai te whakatakotoranga i te kiriata e hiahiatia ana.

E whā ngā taahiraa hei whakatipu kiriata mā te PECVD:

1. Whakatakotoria te anga angiangi ki runga i tētahi irahiko i roto i te rūma whakatakotoranga.
2. Whakauruhia ngā hau tauhohe me ngā huānga whakatakotoranga ki roto i te rūma.
3. Tukua te plasma i waenga i ngā irahiko ka whakamahia te ngaohiko hei whakaoho i te plasma.
4. Ka wehea te hau tauhohe me te tauhohe ki te mata o te papa angiangi hei hanga i tētahi kiriata angiangi, ka marara ngā hua taha ki waho o te ruma.

• Ngā kiriata noa kua whakatakotoria: ngā waikura silicon, te silicon nitride, te silicon amorphous,ngā okitiniri silicon (Si_xO_yN_z).

APCVD

Ko te whakatakotoranga matū mamaoa i te pēhanga hauātea he tikanga whakatakotoranga pāmahana iti e mahia ana i roto i te oumu i te pēhanga hauātea paerewa. Pērā i ētahi atu tikanga CVD, me whai hau mua te APCVD i roto i te rūma whakatakotoranga, kātahi ka piki haere te pāmahana hei whakaoho i ngā tauhohenga ki te mata o te papa, ka whakatakotoranga he kiriata angiangi. Nā te māmā o tēnei tikanga, he tino teitei te tere whakatakotoranga.

• Ngā kiriata noa i whakatakotoria: ngā waikura silicon kua tāpirihia me ngā waikura kāore i tāpirihia, ngā nitrides silicon. E whakamahia ana hoki i roto iwhakamahana.

HDP CVD

Ko te whakatakotoranga matū kohu plasma kiato teitei he putanga o te PECVD e whakamahi ana i te plasma kiato teitei ake, e āhei ai ngā papa ki te tauhohe ki te pāmahana iti iho (i waenga i te 80°C-150°C) i roto i te rūma whakatakotoranga. Mā tēnei ka hangaia he kiriata me ngā āheinga whakakī awaawa pai.

• Ngā kiriata noa e whakatakotoria ana: te hauhā silicon (SiO₂), te hauota silicon (Si₃N₄),kāpira silicon (SiC).

SACVD

He rerekē te whakatakotoranga matū o te kohu i roto i te pēhanga hauātea i ētahi atu tikanga nā te mea kei raro iho i te pēhanga rūma paerewa, ā, e whakamahi ana i te ozone (O₃) hei āwhina i te whakatere i te tauhohenga. Ka puta te tukanga whakatakoto i te pēhanga teitei ake i te LPCVD engari he iti iho i te APCVD, i waenga i te 13,300 Pa me te 80,000 Pa. He teitei te tere whakatakoto o ngā kiriata SACVD, ā, ka pai ake i te pikinga o te pāmahana tae noa ki te 490°C, ā, i taua wā ka tīmata te heke.

• Ngā kiriata noa kua whakatakotoria:BPSG, PSG,TEOS.

Ko Shandong Zhongpeng Special Ceramics Co., Ltd tētahi o ngā otinga rauemi hou uku silicon carbide nui rawa atu i Haina. Uku hangarau SiC: Ko te pakeke o Moh he 9 (ko te pakeke o Moh hou he 13), he ātete pai ki te horo me te waikura, he ātete pai ki te pakū me te ārai-waikura. Ko te roa o te ora ratonga o te hua SiC he 4 ki te 5 ngā wā roa atu i te rauemi alumina 92%. Ko te MOR o RBSiC he 5 ki te 7 ngā wā i tō SNBSC, ka taea te whakamahi mō ngā āhua uaua ake. He tere te tukanga whakatau utu, ko te tuku e rite ana ki te mea i oatitia, ā, ko te kounga kāore he rite. Ka tohe tonu mātou ki te wero i ā mātou whāinga me te tuku i ō mātou ngākau ki te hapori.