Emishinini ye-lithography yokukhiqiza ama-chip, iphutha elingabonakali lingabhubhisa ama-wafers abiza izigidi zamaRandi. Yonke i-micrometer yokufuduka lapha ibalulekile empumelelweni noma ekuhlulekeni kwamasekhethi e-nanoscale, futhi umnyombo osekela lo mdanso onembayo umlingiswa wethu namuhla:izinto ze-silicon carbide ceramic- kufana namandla azinzile emhlabeni we-microscopic, aqaphe indlela yokuphila enembayo yemboni yesimanje ye-semiconductor ezindaweni eziyingozi kakhulu.
I-1, Lapho I-Ceramics Ihlangana Nama-Chips: Inselele Yokugcina Ngokunemba
Izingxenye ze-ceramic ezinembayo zemishini ye-lithography zidinga ukudlala izindima ezintathu ngasikhathi sinye:
Isisekelo esiqine kakhulu: simelana namathani ambalwa okucindezela ngesikhathi sokuchayeka kodwa sihlale singanyakazi.
I-Temperature Sentinel: igcina ukuqina kokushisa ngaphansi kokushaqeka okuphezulu kwe-laser.
I-Vacuum Guardian: igcina izinga le-athomu elithambile iminyaka eyishumi endaweni yokudlidliza eyiziro.
Izinto zensimbi zendabuko zizokhiqiza "ukundindizela okuncane" ngenxa yokwanda nokunciphisa okushisayo, kuyilapho izinto ze-polymer zinzima ukumelana nokugqwala kwe-plasma. Ama-ceramics e-silicon carbide, anesakhiwo sawo esiyingqayizivele se-crystal, afinyelela ibhalansi ephelele ebukhuni, ukuqhutshwa kwe-thermal, kanye nokumelana nokuguquguquka, okwenza kube ukukhetha okuphezulu kwezingxenye eziyinhloko zemishini ye-lithography.
2, Ukunemba kwezinga leNano 'umlindi ongabonakali'
Emishinini ephezulu ye-lithography efana ne-ASML e-Netherlands, i-NIKON ne-CANON e-Japan, izitsha zobumba ze-silicon carbide zibhala kabusha buthule imithetho yokukhiqiza ukunemba:
Isiteji semaski: ukuthwala imaski yesithombe enenani elilingana negolide, igcina ukunemba kokuma kweleveli ye-nanometer ngesikhathi sokunyakaza kwesivinini esikhulu.
I-Reflective mirror substrate: I-surface roughness incane kakhulu, ibushelelezi kunendawo yesibuko.
Igumbi le-vacuum: Ngemva kweminyaka eyishumi yokusetshenziswa, ukuwohloka kungaphansi kwenkulungwane eyodwa yezinwele zomuntu
Lokhu kuzinza cishe 'kwe-anti common sense' kuvela ezakhini zofuzo ezintathu ze-silicon carbide:
1. I-coefficient yokunwetshwa kwe-thermal isondela ku-zero: cishe "iminyaka eyiqhwa" ukusuka -150 ℃ ukuya ku-500 ℃
2. Ukuqina okuphindwe kathathu kunensimbi: ukumelana nomonakalo omncane obangelwa ukuqhuma kwezinhlayiyana
3. Izici zokuzigcoba ngokwakho: Zuza ukudluliswa okunembayo okungenawo uwoyela endaweni yevacuum
3, 'Inguquko ethule' embonini ye-semiconductor
Njengoba inqubo yokukhiqiza ama-chip ingena enkathini ye-2-nanometer, izinto zobumba ze-silicon carbide zeqa imikhawulo eyengeziwe:
I-Dual worktable: ivumela amasistimu amabili ukuthi aqedele "i-atomic level relay" endaweni ye-vacuum.
Isistimu ye-optical path ye-EUV: imelana nokuqhunyiswa kwamabhomu okuqhubekayo kokukhanya kwe-ultraviolet okudlulele okungu-13.5nm.
Uhlelo lokuxhumanisa i-Multi axis: ukuzuza izinyathelo ze-nanoscale ezingu-200 ngomzuzwana ngaphandle kokukhiqiza amaphutha anqwabelene.
Ithimba elithile le-R&D lomshini we-lithography lenze izivivinyo zokuqhathanisa: ngemva kokusebenzisa isiteji se-silicon carbide ceramic workpiece, ukunemba kokumisa uhlelo kuye kwathuthukiswa ngama-40%, futhi umjikelezo wokulungisa imishini unwetshiwe kusukela ezinyangeni ezi-3 kuya eminyakeni emi-2. Lolu shintsho alunciphisi nje kuphela izindleko zokukhiqiza ama-chips, kodwa futhi luletha ukunemba kokukhiqiza "ama-chips aseShayina" phambili kumazinga omhlaba okokuqala ngqa.
4. Indlela yokukhuphuka isuka elabhorethri iye ekuthuthukisweni kwezimboni
Ukukhiqiza izinto zobumba ze-silicon carbide zebanga le-lithography kufana nokwakha 'isigodlo esingenasici' emhlabeni we-microscopic:
Ukuhlanzeka kwempahla eluhlaza: Impushana ehlanzekile ye-silicon carbide, izinkulungwane zezikhathi ezihlanzekile kunosawoti odliwayo.
Inqubo ye-Sintering: ukulawula okunembile kwesiqondisindlela sokukhula kwekristalu kumazinga okushisa aphezulu.
Ukwenza imishini enembile kusetshenziswa amathuluzi okusika idayimane ekuqopheni izinga elincane le-micron kuthatha isikhathi esiningi njengokubuyiselwa kwezinto zamasiko.
Yilokhu kuphumelela okukabili “kokwenziwa kwesayensi yezinto ezibonakalayo+ nokunemba” okwenze izinto zokwakha ezisezingeni eliphezulu, ezake zakhawulelwa ezimbonini zasemkhathini nasezimbonini zempi, manje seziyizingxenye eziyisisekelo ezisekela impucuko yedijithali.
Enqubweni yanamuhla yokukhiqiza ama-chip, afinyelele umkhawulo obonakalayo, izitsha ze-silicon carbide ceramics zifakazela ngezici zayo “zero compromise” ukuthi ukunemba kweqiniso akukhona ukunqwabelana kwedatha, kodwa ukulawula okuphelele phezu kwengqikithi yezinto. Lapho yonke ingxenye ye-ceramic ithwala isithembiso sezigidi zokunyakaza kwe-nanoscale, esikubonayo akukhona nje ukuvela kwemishini ye-semiconductor, kodwa futhi nokuzimisela kwemboni yesizwe ukuqhubekela phambili ekuphakameni kokunemba.
Isikhathi sokuthumela: Apr-03-2025