Emishinini ye-lithography yokukhiqiza ama-chip, iphutha elingabonakali lingabhubhisa ama-wafer abiza izigidi zamaRandi. I-micrometer ngayinye yokufuduka lapha ibalulekile empumelelweni noma ekwehlulekeni kwamasekethe e-nanoscale, futhi umongo osekela lo mdanso wokunemba ngumlingiswa wethu oyinhloko namuhla:izinto ze-ceramic ze-silicon carbide- kufana namandla aqinisayo ezweni elincane kakhulu, elivikela umugqa wokuphila onembile wemboni yesimanje ye-semiconductor ezindaweni ezibucayi.
1, Lapho Izinto Zobumba Zihlangana Nama-Chips: Inselele Enkulu Yokunemba
Izingxenye ze-ceramic ezinembile zemishini ye-lithography zidinga ukudlala izindima ezintathu ngesikhathi esisodwa:
Isisekelo esizinzile kakhulu: simelana nengcindezi eningi ngesikhathi sokuvezwa kodwa asinyakazi.
I-Temperature sentinel: igcina ukuzinza kokushisa ngaphansi kokushaqeka okukhulu kokushisa kwe-laser.
I-Vacuum Guardian: igcina izinga le-athomu liphansi iminyaka eyishumi endaweni engenakudlidliza.
Izinto zensimbi zendabuko zizokhiqiza "ukuthuthumela okuncane" ngenxa yokwanda nokuncipha kokushisa, kuyilapho izinto ze-polymer kunzima ukumelana nokugqwala kwe-plasma. I-silicon carbide ceramics, enesakhiwo sayo esiyingqayizivele sekristalu, ifinyelela ibhalansi ephelele ebulukhunini, ekuqhutshweni kokushisa, kanye nokumelana nokuguquguquka, okwenza kube ukukhetha okuphezulu kwezingxenye eziyinhloko zemishini ye-lithography.
2, 'umlindi ongabonakali' onembile ngezinga le-Nano
Emishinini ye-lithography ephezulu njenge-ASML eNetherlands, i-NIKON kanye ne-CANON eJapane, izitsha zobumba ze-silicon carbide zibhala kabusha buthule imithetho yokukhiqiza ngokunemba:
Isigaba semaski: ukuphatha imaski yesithombe ebiza njengegolide, kugcina ukunemba kokubekwa kwezinga le-nanometer ngesikhathi sokunyakaza ngesivinini esikhulu.
Isisekelo sesibuko esikhanyayo: Ubulukhuni bomphezulu buncane kakhulu, bubushelelezi ngisho nangaphezu kobuso besibuko.
Igumbi lokuhlanza: Ngemva kweminyaka eyishumi yokusetshenziswa, ukuguquka kungaphansi kwengxenye eyodwa kweziyinkulungwane zezinwele zomuntu
Lokhu kuzinza okucishe kube 'okuphambene nomqondo ojwayelekile' kuvela ezizakhini ezintathu zezinto ze-silicon carbide:
1. I-coefficient yokwanda kokushisa isondela ku-zero: cishe "iminyaka eqandisiwe" kusukela ku--150 ℃ kuya ku-500 ℃
2. Kunzima ngokuphindwe kathathu kunensimbi: ukumelana nomonakalo omncane obangelwa ukuqhuma kwezinhlayiya
3. Izici zokuzigcoba: Finyelela ukudluliselwa okunembile okungenawo uwoyela endaweni engenawo umoya
3. 'Inguquko ethule' embonini ye-semiconductor
Njengoba inqubo yokukhiqiza ama-chip ingena enkathini yama-nanometer amabili, izitsha zobumba ze-silicon carbide zidlula imingcele eminingi:
Ithebula eliphindwe kabili lokusebenza: livumela izinhlelo ezimbili ukuqedela "ukudluliselwa kwezinga le-athomu" endaweni engenamuntu.
Uhlelo lwendlela ye-EUV optical: lumelana nokuqhunyiswa okuqhubekayo kokukhanya okunamandla kwe-ultraviolet okungu-13.5nm.
Uhlelo lokuxhumanisa ama-axis amaningi: ukufeza izinyathelo ezingama-nanoscale ezingama-200 ngomzuzwana ngaphandle kokudala amaphutha ahlanganisiwe.
Ithimba elithile le-R&D lomshini we-lithography lenze izivivinyo zokuqhathanisa: ngemuva kokusebenzisa isigaba somsebenzi we-silicon carbide ceramic, ukunemba kokubekwa kwesistimu kuthuthukiswe ngo-40%, kanti umjikelezo wokugcinwa kwemishini unwetshiwe kusukela ezinyangeni ezi-3 kuya eminyakeni emi-2. Lolu shintsho alugcini nje ngokunciphisa izindleko zokukhiqiza ama-chip, kodwa futhi luletha ukunemba kokukhiqiza "ama-chip aseShayina" phambili kwezindinganiso zomhlaba wonke okokuqala ngqa.
4, Indlela yokukhuphuka kusukela elabhorethri kuya ekuthuthukisweni kwezimboni
Ukukhiqiza izitsha zobumba ze-silicon carbide zezinga le-lithography kufana nokwakha 'isigodlo esingenaphutha' ezweni elincane kakhulu:
Ubumsulwa bezinto ezingavuthiwe: Impuphu ye-silicon carbide emsulwa kakhulu, ehlanzekile izikhathi eziyizinkulungwane kunosawoti odliwayo.
Inqubo yokucwenga: ukulawulwa okunembile kwesiqondiso sokukhula kwekristalu emazingeni okushisa aphezulu.
Umshini wokusika idayimane ngendlela enembile usebenzisa amathuluzi okusika idayimane ukuze kuqoshwe izinga le-micron kuthatha isikhathi esiningi njengokuvuselelwa kwezinsalela zamasiko.
Yilokhu kuthuthuka okubili “kwesayensi yezinto zokwakha+ukukhiqiza ngokunemba” okwenze izinto zokwakha ezisezingeni eliphezulu, ezazikade zikhawulelwe ezimbonini zezindiza nezempi, manje seziyizingxenye eziyisisekelo ezisekela impucuko yedijithali.
Enkambisweni yokukhiqiza ama-chip yanamuhla, esefinyelele umkhawulo ongokoqobo, i-silicon carbide ceramics ifakazela ngezici zayo "zokungavumelani neze" ukuthi ukunemba kwangempela akusikho ukuqoqwa kwedatha, kodwa ukulawula okuphelele phezu kwengqikithi yezinto zokwakha. Lapho yonke ingxenye ye-ceramic inesithembiso sezigidi zeminyakazo ye-nanoscale, esikubonayo akukhona nje ukuvela kwemishini ye-semiconductor, kodwa futhi nokuzimisela kwemboni yesizwe ukuqhubekela phambili ekuqondeni.
Isikhathi sokuthunyelwe: Ephreli-03-2025