Mu makina opangira ma chips, cholakwika chosaoneka chingawononge ma wafers ofunika madola mamiliyoni ambiri. Micrometer iliyonse yosunthika pano ndi yofunika kwambiri kuti ma nanoscale circuits apambane kapena alephere, ndipo maziko omwe amathandizira kuvina kolondola kumeneku ndi mtsogoleri wathu lerolino:zinthu za ceramic za silicon carbide- ili ngati mphamvu yokhazikika m'dziko la microscopic, kuteteza chingwe cholondola cha mafakitale amakono a semiconductor m'malo ovuta kwambiri.
1, Pamene Zida Zadothi Zikumana ndi Ma Chips: Vuto Lalikulu Pakulondola
Zigawo zolondola za ceramic za makina ojambulira mawu ziyenera kuchita ntchito zitatu nthawi imodzi:
Maziko ake ndi olimba kwambiri: amapirira kupsinjika kwakukulu panthawi yomwe akuwonekera koma amakhalabe osasuntha.
Woyang'anira kutentha: amasunga kukhazikika kwa kutentha pansi pa kutentha kwakukulu kwa laser.
Vacuum Guardian: imasunga kusalala kwa atomu kwa zaka khumi popanda kugwedezeka.
Zipangizo zachitsulo zachikhalidwe zimapanga "kugwedezeka pang'ono" chifukwa cha kutentha ndi kupindika, pomwe zinthu za polima zimakhala zovuta kukana dzimbiri la plasma. Zida za silicon carbide, zomwe zimakhala ndi kapangidwe kake kapadera ka kristalo, zimakhala ndi kulimba kwabwino, kutentha koyendetsa bwino, komanso kukana kusintha kwa zinthu, zomwe zimapangitsa kuti zikhale chisankho chabwino kwambiri pazigawo zazikulu za makina a lithography.
2, 'woteteza wosaoneka' wolondola kwambiri pamlingo wa Nano
Mu makina apamwamba kwambiri ojambulira mawu monga ASML ku Netherlands, NIKON ndi CANON ku Japan, zoumba za silicon carbide zikulembanso mwakachetechete malamulo opangira molondola:
Gawo la chigoba: kunyamula chigoba chojambulidwa ndi zithunzi chamtengo wapatali ngati golide, kusunga kulondola kwa malo a nanometer panthawi yoyenda mwachangu.
Chophimba chagalasi chowunikira: Kukhwima kwa pamwamba pake ndi kochepa kwambiri, kosalala kuposa pamwamba pagalasi.
Chipinda chotsukiramo mpweya: Pambuyo pa zaka khumi zogwiritsidwa ntchito, kusinthaku kumakhala kochepa kuposa gawo limodzi mwa magawo chikwi a tsitsi la munthu
Kukhazikika kumeneku komwe kumawoneka ngati 'kotsutsana ndi nzeru wamba' kumachokera ku majini atatu a zinthu za silicon carbide:
1. Kuchuluka kwa kutentha komwe kumafika pa zero: pafupifupi "zaka zozizira" kuyambira -150 ℃ mpaka 500 ℃
2. Kulimba katatu kuposa chitsulo: kupirira kuwonongeka kwa tinthu tating'onoting'ono komwe kumachitika chifukwa cha kuphulika kwa tinthu tating'onoting'ono
3. Makhalidwe odzipaka mafuta: Pezani njira yolondola yopanda mafuta pamalo opanda mpweya
3, 'Kusintha kwa chete' mumakampani opanga ma semiconductor
Pamene njira yopangira ma chip ikulowa mu nthawi ya 2-nanometer, zoumba za silicon carbide zikudutsa malire ambiri:
Tebulo logwirira ntchito lawiri: limalola machitidwe awiri kumaliza "kutumiza kwa atomiki" mu malo opanda mpweya.
Dongosolo la njira ya kuwala ya EUV: losagonjetsedwa ndi kuphulika kosalekeza kwa kuwala kwa ultraviolet kwa 13.5nm.
Dongosolo lolumikizirana la ma axis ambiri: kukwaniritsa masitepe 200 a nanoscale pa sekondi iliyonse popanda kupanga zolakwika zochulukirapo.
Gulu lina la akatswiri ofufuza ndi kukonza makina a lithography lachita mayeso oyerekeza: atagwiritsa ntchito gawo la silicon carbide ceramic workpiece, kulondola kwa malo a dongosolo kwawonjezeka ndi 40%, ndipo nthawi yokonza zida yawonjezeka kuchoka pa miyezi itatu mpaka zaka ziwiri. Kusinthaku sikungochepetsa mtengo wopanga ma chips, komanso kumabweretsa kulondola kwa kupanga "ma chips aku China" patsogolo pa miyezo yapadziko lonse lapansi koyamba.
4, Njira yokwera kuchokera ku labotale kupita ku chitukuko cha mafakitale
Kupanga ziwiya za silicon carbide za mtundu wa lithography kuli ngati kumanga 'nyumba yachifumu yopanda cholakwika' m'dziko la microscopic:
Kuyera kwa zinthu zopangira: Ufa wa silicon carbide woyeretsedwa kwambiri, woyera kwambiri kuposa mchere wodyedwa.
Njira yoyeretsera: kuwongolera molondola momwe makristalo amakulira kutentha kwambiri.
Kukonza zinthu pogwiritsa ntchito zida zodulira diamondi podula zinthu za sub micron kumatenga nthawi yofanana ndi kukonzanso zinthu zakale.
Ndi kupita patsogolo kwapawiri kumeneku kwa "sayansi ya zipangizo + kupanga zinthu molondola" komwe kwapangitsa kuti zipangizo zamakono, zomwe kale zinali zongogwiritsidwa ntchito m'makampani opanga ndege ndi ankhondo, tsopano zikhale zinthu zofunika kwambiri zothandizira chitukuko cha digito.
Mu njira yopangira ma chips masiku ano, yomwe yafika pamlingo weniweni, ma silicon carbide ceramics amatsimikizira ndi makhalidwe ake a "zero compromise" kuti kulondola kwenikweni sikuli kusonkhanitsa deta, koma kulamulira kwathunthu kufunika kwa zinthu. Pamene gawo lililonse la ceramic lili ndi lonjezo la mayendedwe mamiliyoni ambiri a nanoscale, chomwe timawona si kusintha kwa zida za semiconductor zokha, komanso kutsimikiza kwa makampani adziko kuti apite patsogolo pa kulondola.
Nthawi yotumizira: Epulo-03-2025