Kwiimashini ze-lithography zokwenza iitships, impazamo engabonakaliyo inokutshabalalisa ii-wafers ezixabisa izigidi zeerandi. Yonke i-micrometer yokufuduka apha ibalulekile kwimpumelelo okanye ukungaphumeleli kweesekethe ze-nanoscale, kwaye isiseko esixhasa lo mdaniso wokuchaneka ngumlinganiswa wethu ophambili namhlanje:izinto ze-silicon carbide ceramic– ifana namandla azinzisayo kwihlabathi elingabonakaliyo, elikhusela umgca wobomi ochanekileyo weshishini le-semiconductor lanamhlanje kwiindawo ezixineneyo.
1, Xa iiCeramics zidibana neeChips: Umngeni oPhezulu wokuChaneka
Izixhobo ze-ceramic ezichanekileyo zoomatshini be-lithography kufuneka zidlale iindima ezintathu ngaxeshanye:
Isiseko esizinzileyo kakhulu: simelana neetoni ezininzi zoxinzelelo ngexesha lokuvezwa kodwa asishukumi.
I-Temperature sentinel: igcina uzinzo lobushushu phantsi koxinzelelo oluphezulu lobushushu lwelaser.
I-Vacuum Guardian: igcina inqanaba le-athomu lithe tyaba kangangeminyaka elishumi kwindawo engenazintshukumo.
Izinto zesinyithi zemveli ziya kuvelisa "iingcangcazela ezincinci" ngenxa yokwanda kobushushu kunye nokuxinana, ngelixa izinto zepolymer kunzima ukumelana nokugqwala kweplasma. Iiceramics zesilicon carbide, ezinesakhiwo sazo sekristale esikhethekileyo, zifezekisa ulungelelwaniso olugqibeleleyo kubunzima, ukuqhuba kobushushu, kunye nokumelana nokuguquguquka, nto leyo ezenza ukuba zibe lolona khetho luphezulu kwiindawo eziphambili zoomatshini be-lithography.
2, 'unogada ongabonakaliyo' ochanekileyo kwinqanaba leNano
Kwiimashini ze-lithography eziphezulu ezifana ne-ASML eNetherlands, i-NIKON kunye ne-CANON eJapan, ii-silicon carbide ceramics zibhala ngokutsha imithetho yokwenziwa ngokuchanekileyo:
Isigaba semaski: ukuphatha imaski yefoto exabisa njengegolide, ukugcina ukuchaneka kokubekwa kwinqanaba le-nanometer ngexesha lokuhamba ngesantya esiphezulu.
Isiseko sesipili esibonakalayo: Uburhabaxa bomphezulu buncinci kakhulu, buthambile nangaphezu komphezulu wesipili.
Igumbi lokucoca ulwelo: Emva kweminyaka elishumi yokusetyenziswa, ukuguquka kolwelo kungaphantsi kwewaka leenwele zomntu
Oku kuzinza okuphantse 'kuchasene nengqiqo eqhelekileyo' kuvela kwiijini ezintathu zezinto ze-silicon carbide:
1. I-coefficient yokwandiswa kobushushu isondela ku-zero: phantse "ubudala obuqandisiweyo" ukusuka kwi--150 ℃ ukuya kwi-500 ℃
2. Inzima ngokuphindwe kathathu kunentsimbi: iyamelana nomonakalo obangelwa kukuqhushumba kwamasuntswana
3. Iimpawu zokuzithambisa: Fumana uthumelo oluchanekileyo olungenawo ioyile kwindawo engenamoya
3, 'Uguquko oluthuleyo' kushishino lwe-semiconductor
Njengoko inkqubo yokuvelisa iitships ingena kwixesha le-2-nanometer, iiceramics ze-silicon carbide zidlula kwimida engaphezulu:
Itheyibhile yokusebenza ephindwe kabini: ivumela iinkqubo ezimbini ukuba zigqibezele "ukudluliselwa kwenqanaba le-athomu" kwindawo engenamoya.
Inkqubo yendlela ye-EUV optical: imelana nokuqhushumba okuqhubekayo kokukhanya okugqithisileyo kwe-ultraviolet eyi-13.5nm.
Inkqubo yokudibanisa i-Multi axis: ukufikelela kumanyathelo angama-200 e-nanoscale ngomzuzwana ngaphandle kokuvelisa iimpazamo eziqokelelweyo.
Iqela elithile le-R&D lomatshini we-lithography lenze uvavanyo oluthelekisayo: emva kokusebenzisa inqanaba lomsebenzi we-silicon carbide ceramic, ukuchaneka kokubekwa kwenkqubo kuphuculwe ngama-40%, kwaye umjikelo wokugcinwa kwezixhobo wolulwe ukusuka kwiinyanga ezi-3 ukuya kwiminyaka emi-2. Olu tshintsho alunciphisi nje kuphela iindleko zemveliso yeetships, kodwa lukwazisa ukuchaneka kokwenziwa kweetships “zesiTshayina” phambili kwimigangatho yamazwe ngamazwe okokuqala.
4. Indlela yokunyuka ukusuka kwilebhu ukuya kwimizi-mveliso
Ukuvelisa iiseramikhi ze-silicon carbide ze-lithography grade kufana nokwakha 'ibhotwe elingenasiphako' kwihlabathi le-microscopic:
Ubumsulwa bezinto eziluhlaza: Umgubo we-silicon carbide ococekileyo kakhulu, ohlaziyiweyo ngokuphindwe kangangamawaka kunetyuwa etyiwayo.
Inkqubo yokusila: ulawulo oluchanekileyo lwecala lokukhula kwekristale kumaqondo obushushu aphezulu.
Umatshini wokusika ngokuchanekileyo usebenzisa izixhobo zokusika iidayimani zokusika i-sub micron level kuthatha ixesha elifana nelokubuyiselwa kwezinto zakudala.
Yile nkqubela imbini "yesayensi yezinto zokwakha + ukwenziwa ngokuchanekileyo" eyenze izinto ezisemgangathweni, ezazikade zilinganiselwe kumashishini eenqwelo moya kunye nawomkhosi, ngoku zibe zizinto ezisisiseko ezixhasa impucuko yedijithali.
Kwinkqubo yanamhlanje yokuvelisa iitshiphusi, efikelele kumda obonakalayo, ii-silicon carbide ceramics zingqina ngeempawu zazo "ezingenakho ukuvumelana" ukuba ukuchaneka kokwenyani akusiyo ukuqokelelwa kwedatha, kodwa lulawulo olupheleleyo phezu kobunzulu bezinto. Xa yonke into ye-ceramic ithembisa izigidi zeentshukumo ze-nanoscale, esikubonayo akukuphela nje kokuguquka kwezixhobo ze-semiconductor, kodwa nokuzimisela kweshishini lesizwe ukuba lihambe liye kwincopho yokuchaneka.
Ixesha leposi: Epreli-03-2025