A cikin injunan lithography don kera guntu, kuskuren da ba a iya gani ba zai iya lalata wafers masu darajar miliyoyin daloli. Kowace micrometer na matsuguni a nan yana da mahimmanci ga nasara ko gazawar da'irorin nanoscale, kuma babban abin da ke tallafawa wannan rawar daidai shine gwarzonmu a yau:kayan yumbu na silicon carbide- kamar ƙarfin da ke daidaita yanayi ne a duniyar da ba ta da yawa, wanda ke kare madaidaicin layin rayuwar masana'antar semiconductor ta zamani a cikin mawuyacin yanayi.
1, Lokacin da Ceramics suka haɗu da Chips: Babban Kalubale a Daidaito
Daidaitattun sassan yumbu na injunan lithography suna buƙatar yin ayyuka uku a lokaci guda:
Tushe mai ƙarfi sosai: yana jure wa tarin matsi da yawa a lokacin da aka fallasa shi amma yana nan ba tare da motsi ba.
Mai tsaron zafin jiki: yana kiyaye kwanciyar hankali na zafi a ƙarƙashin girgizar zafi mai yawa na laser.
Vacuum Guardian: yana kula da matakin atomic na tsawon shekaru goma a cikin yanayin girgizar sifili.
Kayan ƙarfe na gargajiya za su samar da "ƙarancin girgiza" saboda faɗaɗawa da matsewar zafi, yayin da kayan polymer suna da wahalar jure wa tsatsa a cikin plasma. Yumburan silicon carbide, tare da tsarin kristal na musamman, suna samun daidaito mai kyau a cikin tauri, ƙarfin wutar lantarki, da juriyar nakasa, wanda hakan ya sa su zama babban zaɓi ga manyan abubuwan da ke cikin injunan lithography.
2, daidaitaccen matakin Nano 'mai tsaron da ba a iya gani'
A cikin manyan injunan lithography kamar ASML a Netherlands, NIKON da CANON a Japan, yumburan silicon carbide suna sake rubuta ƙa'idodin kera daidai gwargwado a hankali:
Matakin abin rufe fuska: ɗauke da abin rufe fuska mai darajar zinare, yana kiyaye daidaiton matsayin nanometer yayin motsi mai sauri.
Madaurin madubi mai haske: Taurin saman yana da ƙanƙanta sosai, har ma ya fi santsi fiye da saman madubi.
Ɗakin injin tsabtace iska: Bayan shekaru goma na amfani da shi, nakasar gashin mutum ba ta kai kashi ɗaya cikin ɗari na gashin mutum ba.
Wannan kwanciyar hankali na 'maganin da ba na hankali ba' ya samo asali ne daga kwayoyin halitta guda uku na kayan silicon carbide:
1. Matsakaicin faɗaɗa zafi ya kusanci sifili: kusan "shekarun daskararre" daga -150 ℃ zuwa 500 ℃
2. Sau uku ya fi ƙarfe ƙarfi: yana jure wa lalacewar ƙananan ƙwayoyin cuta da fashewar ƙwayoyin cuta ke haifarwa
3. Halayen shafawa kai: Samu daidaitaccen watsawa ba tare da mai ba a cikin yanayi mai tsabta
3, 'Juyin juya halin shiru' a cikin masana'antar semiconductor
Yayin da tsarin kera guntu ya shiga zamanin nanometer 2, yumburan silicon carbide suna karya wasu iyakoki:
Tebur mai aiki biyu: yana ba da damar tsarin biyu su kammala "relay matakin atomic" a cikin yanayin injin.
Tsarin hanyar gani ta EUV: yana jure wa ci gaba da jefa bama-bamai na hasken ultraviolet mai tsananin 13.5nm.
Tsarin haɗin axis da yawa: cimma matakai 200 nanoscale a kowace daƙiƙa ba tare da haifar da kurakurai masu tarin yawa ba.
Wata ƙungiyar bincike da ci gaba ta injin lithography ta gudanar da gwaje-gwajen kwatantawa: bayan amfani da matakin aikin yumbu na silicon carbide, daidaiton wurin sanya tsarin ya inganta da kashi 40%, kuma an tsawaita lokacin kula da kayan aiki daga watanni 3 zuwa shekaru 2. Wannan canjin ba wai kawai yana rage farashin samar da guntu ba ne, har ma yana kawo daidaiton kera "guntu na China" a sahun gaba a ƙa'idodin ƙasa da ƙasa a karon farko.
4, Hanyar hawa daga dakin gwaje-gwaje zuwa masana'antu
Yin amfani da fasahar silicon carbide mai inganci kamar gina 'fadar da ba ta da lahani' a duniyar da ba ta da lahani:
Tsarkakken abu: Foda mai tsafta ta silicon carbide, wadda ta fi gishirin da ake ci sau dubu.
Tsarin yin siminti: daidaitaccen iko na alkiblar girma ta lu'ulu'u a yanayin zafi mai yawa.
Injin gyaran da aka yi daidai da amfani da kayan aikin yanke lu'u-lu'u don sassaka matakin ƙananan micron yana ɗaukar lokaci mai yawa kamar gyaran kayan tarihi na al'adu.
Wannan ci gaba ne mai girma biyu na "kimiyyar kayan aiki + daidaiton kera kayayyaki" wanda ya sanya kayan zamani, waɗanda a da aka iyakance su ga masana'antun sararin samaniya da na soja, yanzu sun zama muhimman abubuwan da ke tallafawa wayewar dijital.
A cikin tsarin kera guntu na yau, wanda ya kai ga iyakar zahiri, yumburan silicon carbide suna tabbatar da halayensu na "rashin daidaito" cewa daidaiton gaskiya ba shine tarin bayanai ba, amma shine babban iko akan ainihin kayan. Lokacin da kowane ɓangaren yumbu ke ɗauke da alƙawarin miliyoyin motsi na nanoscale, abin da muke gani ba wai kawai shine juyin halittar kayan aikin semiconductor ba, har ma da ƙudurin masana'antar ƙasa don matsawa zuwa ga kololuwar daidaito.
Lokacin Saƙo: Afrilu-03-2025