I roto i ngā mīhini whakairo mō te hanga maramara, ka taea e tētahi hapa e kore e kitea te whakangaro i ngā wafer e miriona tāra te uara. He mea nui ia maikoromita o te nekehanga i konei mō te angitu, te kore rānei o ngā ara iahiko nano, ā, ko te uho e tautoko ana i tēnei kanikani tika ko tā tātou toa i tēnei rā:rauemi uku silicon carbide– he rite ki tētahi kaha whakau i roto i te ao moroiti, e tiaki ana i te ara ora o te umanga haurua-ā-ira hou i roto i ngā taiao tino kino.
1, Ina tūtaki ngā uku ki ngā maramara: He wero nui mō te tika
E toru ngā mahi a ngā wāhanga uku tino tika o ngā mīhini whakairo kohatu i te wā kotahi:
He turanga tino pumau: ka tu atu ki ngā tāne pēhanga i te wā e pāngia ana engari ka noho kore e nekeneke.
Kaitiaki pāmahana: ka pupuri i te pumau o te pāmahana i raro i te ru wera nui o te taiaho.
Kaitiaki Korehau: ka pupuri i te papatahi o te taumata ngota mō ngā tau tekau i roto i te taiao kore wiri.
Ka puta he "ngā wiri iti" i ngā rauemi whakarewa tuku iho nā te whānui me te whakahekenga wera, engari he uaua ki ngā rauemi polymer te ātete ki te waikura plasma. Nā te hanganga tioata ahurei o ngā uku silicon carbide, ka tutuki he taurite tino pai i roto i te pakeke, te kawe wera, me te ātete ki te hurihanga, ā, koinei te whiringa matua mō ngā wāhanga matua o ngā mīhini lithography.
2, 'Kaitiaki huna' tino tika taumata nano
I roto i ngā mīhini whakairo papa teitei pērā i a ASML i te Netherlands, NIKON me CANON i Hapani, kei te tuhi anō ngā uku silicon carbide i ngā ture o te hanga tino tika:
Wāhanga kōpare: e mau ana i tētahi kōpare whakaahua he rite te uara ki te koura, e pupuri ana i te tika o te tūnga taumata nanometer i te wā e neke ana i te tere tiketike.
Papa whakaata whakaata: He tino iti te taratara o te mata, he maeneene ake i te mata whakaata.
Rūma korehau: I muri i ngā tau tekau o te whakamahinga, he iti iho i te kotahi mano o te makawe tangata te rerekētanga o te āhua
I ahu mai tēnei pumau tata 'koretake ki te whakaaro noa' i ngā ira tokotoru o ngā rauemi silicon carbide:
1. Ko te tauwehenga o te whakawhānui wera e tata ana ki te kore: tata ki te "pakeke tio" mai i te -150 ℃ ki te 500 ℃
2. E toru ngā wā e mārō atu ana i te maitai: ātete ki ngā kino moroiti i puta mai i te pupuhitanga o ngā matūriki
3. Ngā āhuatanga whakahinuhinu-ā-roto: Whakatutuki i te tuku tika kore-hinu i roto i te taiao korehau
3. Te 'hurihanga puku' i roto i te umanga haurua-ira
I te taenga mai o te tukanga hanga maramara ki te wā 2-nanometer, kei te pakaru haere ngā uku silicon carbide i ngā rohe maha atu:
Tēpu mahi takirua: ka taea e ngā pūnaha e rua te whakaoti i te "whakawhiti taumata ngota" i roto i te taiao korehau.
Pūnaha ara whatu EUV: ātete ki te pupuhi tonu o te mārama ultraviolet tino kaha 13.5nm.
Pūnaha hononga tuaka maha: te whakatutuki i te 200 hikoinga nano ia hekona me te kore e whakaputa hapa whakaemi.
Kua whakahaerehia e tētahi tīma rangahau me te whakawhanake mīhini whakairo te whakamātautau whakatairite: whai muri i te whakamahinga o te atamira mahi uku silicon carbide, kua pai ake te tika o te tūnga o te pūnaha mā te 40%, ā, kua roa ake te huringa tiaki taputapu mai i te 3 marama ki te 2 tau. Ehara i te mea ka whakaitihia noa e tēnei panonitanga te utu hanga o ngā maramara, engari ka kawea mai hoki te tika hanga o ngā "maramara Hainamana" ki mua i ngā paerewa o te ao mō te wā tuatahi.
4, Te ara piki mai i te taiwhanga ki te ahumahi
He rite te hanga i ngā uku silicon carbide kounga lithography ki te hanga i tētahi 'whare rangatira' i roto i te ao moroiti:
Te parakore o ngā rauemi mata: Paura silicon carbide tino parakore, mano tini ngā wā he parakore ake i te tote kai.
Te tukanga whakapūtanga: te whakahaere tika i te ahunga tipu o te tioata i ngā pāmahana tiketike.
He rite te roa o te wā e pau ana ki te whakaora i ngā taonga tuku iho, arā, ko te whakamahi i ngā taputapu tapahi taimana mō te whakairo i ngā taumata iti iho i te maikoron.
Nā tēnei putanga rua o te "pūtaiao rauemi me te hanga tino tika" i huri ai ngā rauemi hou, i ngā ahumahi rererangi me te hōia i mua, hei wāhanga matua mō te ao matihiko.
I roto i te tukanga hanga maramara o ēnei rā, kua eke ki te taumata ā-tinana, ka whakaatu ngā uku karawiti silicon me ōna āhuatanga "kore e tutuki" ko te tino tika ehara i te whakarārangi raraunga, engari ko te mana whakahaere mutunga kore ki te mauri o ngā rauemi. Ina mau ia wāhanga uku i te oati o ngā miriona nekehanga nanoscale, ko tā tātou e kite nei ehara i te whanaketanga o ngā taputapu semiconductor anake, engari ko te whakatau hoki o te ahumahi o te motu ki te neke ki te tihi o te tika.
Wā tuku: Paenga-whāwhā-03-2025