Mumichina ye lithography yekugadzira machipisi, kukanganisa kusingaonekwe kunogona kuparadza mawafers anokosha mamiriyoni emadhora. Micrometer yega yega yekuchinjika pano yakakosha pakubudirira kana kukundikana kwemasekete e nanoscale, uye chinhu chikuru chinotsigira kutamba uku kwakanyatsojeka ndicho chinotungamira chedu nhasi:zvinhu zveceramic zvesilicon carbide- zvakaita sesimba rinodzikamisa zvinhu munyika isingaoneki, richichengetedza nzira chaiyo yeindasitiri yemazuva ano ye semiconductor munzvimbo dzakaoma.
1, Kana Ceramics Ikasangana neChips: Dambudziko Rekupedzisira Mukururama
Zvikamu zveceramic zvakanyatsonaka zvemichina ye lithography zvinofanira kuita mabasa matatu panguva imwe chete:
Hwaro hwakasimba kwazvo: hunogona kutsungirira kumanikidzwa kwakawanda panguva yekuratidzwa asi hunoramba hwakamira.
Tembiricha yemurindi: inochengetedza kugadzikana kwekupisa pasi pekupiswa kwakanyanya nelaser.
Vacuum Guardian: inochengetedza mazinga eatomu akatsetseka kwemakore gumi munzvimbo isina kuzununguka.
Zvinhu zvesimbi zvechinyakare zvinogadzira "kudengenyeka kudiki" nekuda kwekuwedzera kwekupisa uye kudzikira, nepo zvinhu zvepolymer zvakaoma kuramba ngura yeplasma. Zviumbwa zvesilicon carbide, zvine chimiro chazvo chakasiyana chekristaro, zvinowana chiyero chakakwana mukuoma, kufambisa kupisa, uye kuramba kuchinjika, zvichiita kuti zvive sarudzo yepamusoro yezvikamu zvikuru zvemichina ye lithography.
2, Nano level chaiyo 'muchengeti asingaonekwe'
Mumichina yepamusoro ye lithography yakaita seASML muNetherlands, NIKON neCANON muJapan, silicon carbide ceramics iri kunyora patsva chinyararire mitemo yekugadzira nemazvo:
Danho remasiki: kutakura masiki emufananidzo anokosha segoridhe, kuchengetedza kurongeka kwenzvimbo ye nanometer panguva yekufamba nekukurumidza.
Chigadziko chegirazi chinopenya: Kukombama kwepamusoro kudiki kwazvo, kwakapfava kupfuura pamusoro pegirazi.
Kamuri rekushandisa: Mushure memakore gumi ekushandiswa, kushanduka kwebvudzi remunhu hakupfuuri chiuru chimwe chete pabvudzi remunhu.
Kugadzikana uku kunenge 'kunopesana nepfungwa dzakajairika' kunobva mumajini matatu ezvinhu zvesilicon carbide:
1. Kuwanda kwekuwedzera kwekupisa kunosvika zero: inenge "nguva yechando" kubva -150 ℃ kusvika 500 ℃
2. Kuoma katatu kupfuura simbi: kunodzivirira kukuvara kusingaonekwi kunokonzerwa nekubhombwa kwezvikamu
3. Hunhu hwekuzvizora wega: Wana nzira chaiyo yekutumira mafuta isina mafuta munzvimbo isina vacuum
3. 'Chimurenga chinyararire' muindasitiri yesemiconductor
Sezvo maitiro ekugadzira machipisi achipinda munguva ye2-nanometer, silicon carbide ceramics iri kupfuura nemiganhu yakawanda:
Tafura mbiri dzebasa: dzinobvumira masisitimu maviri kupedzisa "atomic level relay" munzvimbo isina vacuum.
Sisitimu yeEUV optical path: inodzivirira kubhomba kunoramba kuripo kwechiedza che 13.5nm chakanyanya che ultraviolet.
Sisitimu yekubatanidza axis dzakawanda: kuita matanho mazana maviri e nanoscale pasekondi pasina kugadzira zvikanganiso zvakaunganidzwa.
Chikwata cheR&D chemuchina we lithography chakaita bvunzo dzekuenzanisa: mushure mekushandisa silicon carbide ceramic workpiece stage, kurongeka kwekuisa system kwakawedzerwa ne40%, uye nguva yekugadzirisa michina yakawedzerwa kubva pamwedzi mitatu kusvika kumakore maviri. Kuchinja uku hakungoderedzi chete mari yekugadzira machipisi, asiwo kunoita kuti kurongeka kwekugadzira machipisi echiChinese kuve pamberi pemitemo yepasi rose kekutanga.
4, Nzira yekukwira kubva murabhoritari kuenda mukugadzirwa kwemaindasitiri
Kugadzira zviumbwa zvesilicon carbide zvemhando ye lithography kwakafanana nekuvaka 'imba yamambo isina chainopomerwa' munyika isingagoni kunzwisiswa nemaziso:
Kuchena kwezvinhu zvisina kucheneswa: Upfu hwesilicon carbide hwakachena zvakanyanya, hwakapetwa zviuru kupfuura munyu unodyiwa.
Maitiro ekuchenesa: kudzora kwakarurama kwenzira yekukura kwekristaro pakupisa kwakanyanya.
Kugadzira nemazvo uchishandisa maturusi ekucheka madhaimani ekucheka zvidimbu zve micron kunotora nguva yakafanana nekugadziriswa kwezvisaririra zvetsika.
Ndiko kubudirira kuviri uku kwe "sainzi yezvinhu + kugadzira zvinhu nemazvo" kwakaita kuti zvinhu zvemazuva ano, izvo zvaimbove zvakangogumira kumaindasitiri endege nemauto, zvino zvave zvinhu zvakakosha zvinotsigira budiriro yedhijitari.
Mukugadzirwa kwemachipisi kwanhasi, kwasvika pamuganhu chaiwo, silicon carbide ceramics inoratidza nehunhu hwayo hwekuti "hapana kubvumirana" kuti kunyatsojeka kwechokwadi hakusi kuunganidzwa kwedata, asi kutonga kwekupedzisira pamusoro pehunhu hwezvinhu. Kana chikamu chega chega checeramic chiine vimbiso yekufamba kwemamiriyoni e nanoscale, chatinoona kwete kungoshanduka kwemidziyo ye semiconductor, asiwo kutsunga kweindasitiri yenyika kuenda kunhanho yepamusoro yekunyatsojeka.
Nguva yekutumira: Kubvumbi-03-2025