Hauv cov tshuab lithography rau kev tsim cov chips, qhov yuam kev uas tsis pom tuaj yeem rhuav tshem cov wafers uas muaj nqis ntau lab daus las. Txhua lub micrometer ntawm kev hloov chaw ntawm no yog qhov tseem ceeb rau kev vam meej lossis kev ua tsis tiav ntawm cov nanoscale circuits, thiab lub hauv paus uas txhawb nqa qhov kev seev cev precision no yog peb tus thawj coj niaj hnub no:silicon carbide ceramic khoom- nws zoo li lub zog ruaj khov hauv lub ntiaj teb me me, tiv thaiv txoj kab kev ua haujlwm ntawm kev lag luam semiconductor niaj hnub no hauv qhov chaw ib puag ncig hnyav.
1, Thaum Ceramics Ntsib Chips: Ib qho kev sib tw kawg hauv kev raug
Cov khoom siv ceramic precision ntawm cov tshuab lithography yuav tsum ua peb lub luag haujlwm tib lub sijhawm:
Lub hauv paus ruaj khov heev: tiv taus ntau tons ntawm qhov siab thaum lub sijhawm raug tab sis tseem tsis txav.
Kub Sentinel: tswj kev ruaj khov thermal nyob rau hauv kev kub thermal poob siab ntawm laser.
Tus Saib Xyuas Lub Tshuab Nqus Tsev: tswj qhov tiaj tiaj ntawm qib atomic rau kaum xyoo hauv qhov chaw tsis muaj kev co.
Cov ntaub ntawv hlau ib txwm yuav tsim "micro tremors" vim yog thermal expansion thiab contraction, thaum cov ntaub ntawv polymer nyuaj rau tiv taus plasma corrosion. Silicon carbide ceramics, nrog lawv cov qauv siv lead ua tshwj xeeb, ua tiav qhov sib npaug zoo meej hauv qhov nyuaj, thermal conductivity, thiab deformation tsis kam, ua rau lawv yog qhov kev xaiv zoo tshaj plaws rau cov khoom tseem ceeb ntawm cov tshuab lithography.
2, Nano theem precision 'tus neeg saib xyuas tsis pom'
Hauv cov tshuab lithography zoo tshaj plaws xws li ASML hauv Netherlands, NIKON thiab CANON hauv Nyiv, silicon carbide ceramics maj mam rov sau cov cai ntawm kev tsim khoom meej:
Theem Npog Ncauj: nqa lub photomask uas muaj nqis npaum li kub, tswj qhov tseeb ntawm qib nanometer thaum lub sijhawm txav mus los ceev.
Daim iav reflection substrate: Qhov roughness ntawm qhov chaw yog me heev, txawm tias du dua li daim iav nto.
Chav nqus tsev: Tom qab kaum xyoo siv, qhov kev hloov pauv tsawg dua ib feem txhiab ntawm cov plaub hau tib neeg
Qhov kev ruaj khov no yuav luag 'tsis zoo li kev nkag siab' yog los ntawm peb lub noob ntawm cov ntaub ntawv silicon carbide:
1. Tus coefficient ntawm thermal expansion ze li xoom: yuav luag "khov hnub nyoog" los ntawm -150 ℃ txog 500 ℃
2. Peb zaug nyuaj dua hlau: tiv taus kev puas tsuaj me me los ntawm kev tawg ua tej daim me me
3. Cov yam ntxwv ntawm kev siv lubrication: Ua tiav qhov kev sib kis uas tsis muaj roj hauv qhov chaw nqus tsev
3, Lub 'kev hloov pauv ntsiag to' hauv kev lag luam semiconductor
Raws li cov txheej txheem tsim khoom siv chip nkag mus rau hauv 2-nanometer era, silicon carbide ceramics tab tom tawg ntau qhov kev txwv:
Rooj ua haujlwm ob chav: tso cai rau ob lub tshuab ua kom tiav "atomic level relay" hauv qhov chaw nqus tsev.
EUV optical path system: tiv taus kev sib ntaus sib tua tas mus li ntawm 13.5nm lub teeb ultraviolet hnyav.
Kev sib txuas ntawm ntau txoj kab sib txuas: ua tiav 200 kauj ruam nanoscale ib ob yam tsis muaj kev ua yuam kev sib sau ua ke.
Ib pab pawg R&D tshuab lithography tau ua qhov kev sim sib piv: tom qab siv cov khoom siv silicon carbide ceramic workpiece theem, qhov tseeb ntawm qhov system tau txhim kho los ntawm 40%, thiab lub voj voog txij nkawm khoom siv tau ntev los ntawm 3 lub hlis mus rau 2 xyoos. Qhov kev hloov pauv no tsis yog tsuas yog txo cov nqi tsim khoom ntawm cov chips, tab sis kuj coj qhov tseeb ntawm kev tsim khoom ntawm "Suav chips" mus rau pem hauv ntej ntawm cov qauv thoob ntiaj teb thawj zaug.
4, Txoj kev nce toj ntawm chav kuaj mus rau kev lag luam
Kev tsim cov lithography qib silicon carbide ceramics zoo li kev tsim lub 'tsev loj cuj zoo kawg' hauv lub ntiaj teb me me:
Cov khoom siv raw purity: Ultra pure silicon carbide hmoov, ntau txhiab zaus purer dua li ntsev noj tau.
Cov txheej txheem sintering: kev tswj hwm qhov tseeb ntawm kev loj hlob ntawm cov siv lead ua ke ntawm qhov kub siab.
Kev siv cov cuab yeej txiav pob zeb diamond rau kev txiav cov khoom siv hauv qab micron siv sijhawm ntau npaum li kev kho dua tshiab cov khoom qub txeeg qub teg.
Nws yog qhov kev tshawb pom ob zaug ntawm "kev tshawb fawb txog cov ntaub ntawv + kev tsim khoom raug" uas tau ua rau cov ntaub ntawv tshiab, uas ib zaug tsuas yog txwv rau kev lag luam aerospace thiab tub rog, tam sim no dhau los ua cov khoom tseem ceeb uas txhawb nqa kev vam meej digital.
Hauv cov txheej txheem tsim khoom siv niaj hnub no, uas tau mus txog qhov txwv ntawm lub cev, silicon carbide ceramics ua pov thawj nrog nws cov yam ntxwv "zero compromise" uas qhov tseeb precision tsis yog qhov stacking ntawm cov ntaub ntawv, tab sis qhov kawg tswj hwm qhov tseem ceeb ntawm cov ntaub ntawv. Thaum txhua lub Cheebtsam ceramic nqa cov lus cog tseg ntawm lab tus nanoscale txav, qhov peb pom tsis yog tsuas yog kev hloov pauv ntawm cov khoom siv semiconductor, tab sis kuj yog kev txiav txim siab ntawm lub teb chaws kev lag luam kom txav mus rau qhov siab tshaj plaws ntawm precision.
Lub sijhawm tshaj tawm: Plaub Hlis-03-2025