Mu mashini zikora lithography, ikosa ritagaragara rishobora kwangiza wafers zifite agaciro ka miliyoni z'amadolari. Buri mikorometero imwe yo kwimura hano ni ingenzi kugira ngo imiyoboro ya nanoscale igere ku ntsinzi cyangwa inanirwa, kandi ingenzi ishyigikira iyi mbyino nziza ni ingenzi muri iki gihe:ibikoresho bya keramike bya silikoni karubide- ni nk'imbaraga ikomeza gutuza mu isi idafite mikorosikopi, irinda umuyoboro w'ubuzima w'inganda zigezweho za semiconductor mu bidukikije bikomeye.
1, Iyo Ceramic Ihuye n'Ibice by'Ibumba: Ingorane ikomeye mu Gukoresha Ubuziranenge
Ibice bya ceramic by’imashini zikora lithography bigomba kugira inshingano eshatu icyarimwe:
Ishingiro rihamye cyane: rihangana n'igitutu kinini mu gihe cyo kugaragara ariko ntirigire aho rihagarara.
Umurinzi w'ubushyuhe: agumana ubushyuhe buhamye mu gihe cy'ihungabana rikomeye ry'ubushyuhe rya laser.
Vacuum Guardian: igumana ubugari bw'urwego rwa atome mu gihe cy'imyaka icumi mu kirere kidahindagurika.
Ibikoresho by'icyuma gakondo bizatera "imitingito mito" bitewe no kwaguka no guhindagurika kw'ubushyuhe, mu gihe ibikoresho bya polymer bigoye kwihanganira kwangirika kwa plasma. Ibumba rya silicon carbide, rifite imiterere yihariye ya kristale, rigera ku buringanire butunganye mu gukomera, imikorere y'ubushyuhe, no kudahinduka kw'imiterere, bigatuma riba amahitamo meza ku bice by'ingenzi by'imashini za lithography.
2, 'umurinzi utagaragara' wo ku rwego rwa Nano
Mu mashini zo mu rwego rwo hejuru zikora lithography nka ASML mu Buholandi, NIKON na CANON mu Buyapani, ibumba rya silicon carbide ririmo kwandika bucece amategeko agenga ikorwa ry’ubuhanga:
Icyiciro cya mask: gutwara mask ifite agaciro kangana n'aka zahabu, ikomeza gushyira urwego rwa nanometer mu gihe cyo kugenda ku muvuduko mwinshi.
Indorerwamo igaragara: Ubuso buto cyane, ndetse buroroshye kurusha ubuso bw'indorerwamo.
Icyumba cy'ubusatsi: Nyuma y'imyaka icumi ikoreshwa, ubwihindurize bw'umusatsi w'umuntu buri munsi ya kimwe cya cumi cy'umusatsi w'umuntu
Uku kudahinduka kw'ubwenge busanzwe bituruka ku ngirabuzimafatizo eshatu z'ibikoresho bya silicon carbide:
1. Igipimo cy'ubwiyongere bw'ubushyuhe kigera kuri zeru: hafi "imyaka ikonje" kuva kuri -150 ℃ kugeza kuri 500 ℃
2. Ingufu eshatu kurusha icyuma: irwanya kwangirika kwa mikorosikopi guterwa n'uduce duto tw'ibisasu
3. Ibiranga kwisiga: Kugera ku buryo buboneye bwo kohereza amavuta mu buryo budafite amavuta mu kirere gifunze
3, 'Impinduka y'ubucece' mu nganda za semiconductor
Uko igikorwa cyo gukora chips kigeze mu gihe cya nanometero ebyiri, ibumba rya silicon carbide ririmo kurenga imipaka myinshi:
Imbonerahamwe y'akazi ebyiri: yemerera sisitemu ebyiri kurangiza "gusubiza hamwe urwego rwa atome" mu kirere cy'ubusa.
Sisitemu y'inzira ya optique ya EUV: irwanya ibisasu bihoraho by'urumuri rwinshi rwa ultraviolet rwa 13.5nm.
Sisitemu yo guhuza inkingi nyinshi: kugera ku ntambwe 200 za nanoscale kuri buri segonda nta makosa akozwe.
Itsinda ry’ubushakashatsi n’iterambere ry’imashini ikora ubushakashatsi ku mikorere ryakoze ibizamini bigereranya: nyuma yo gukoresha icyuma gikozwe muri silicon carbide, uburyo bwo gushyira ibintu mu buryo buboneye bwazamuweho 40%, kandi igihe cyo kubungabunga ibikoresho cyongerewe kuva ku mezi 3 kugeza ku myaka 2. Iri hinduka ntirigabanya gusa ikiguzi cyo gukora imashini, ahubwo rinashyira imbere uburyo bwo gukora imashini zikora ...
4, Inzira yo kuzamuka kuva muri laboratwari kugera mu nganda
Gukora ibumba rya silikoni rya karubide ryo mu rwego rwa lithography ni nko kubaka 'ingoro itagira inenge' mu isi ya mikorosikopi:
Isuku y'ibikoresho fatizo: Ifu ya silikoni karubide isukuye cyane, inshuro ibihumbi isukuye kurusha umunyu uribwa.
Uburyo bwo gusya: kugenzura neza icyerekezo cy'imikurire ya kristu ku bushyuhe bwinshi.
Gutunganya neza hakoreshejwe ibikoresho byo gukata diyama mu gukata mu rwego rwa submicron bifata igihe kingana n'igihe cyo kuvugurura ibisigazwa by'umuco.
Ni uku gutera imbere gukomeye kw' "ubumenyi bw'ibikoresho + gukora neza" byatumye ibikoresho bigezweho, byahoze bikorerwa mu nganda z'indege n'iza gisirikare, ubu biba ibintu by'ingenzi bishyigikira iterambere ry'ikoranabuhanga.
Mu gikorwa cyo gukora ibyuma binini muri iki gihe, kigeze ku rugero ntarengwa, ibyuma binini bya silikoni bigaragaza ko "ubuhanga nyakuri atari ugukusanya amakuru, ahubwo ari bwo buryo bwo kugenzura ibintu byose. Iyo buri gice cy'ibinini gifite isezerano ry'ingendo za miliyoni nyinshi za nanoscale, icyo tubona si uguhinduka kw'ibikoresho bya semiconductor gusa, ahubwo ni no kwiyemeza kw'inganda z'igihugu kugera ku rwego rwo hejuru rw'ubuhanga.
Igihe cyo kohereza: Mata-03-2025