SiC - Carbide ya Silicon

Carbide ya Silicon yavumbuwe mu 1893 nk'inganda zangiza inganda zo gusya ibiziga na feri y'imodoka. Ahagana hagati yikinyejana cya 20, SiC wafer ikoresha yarakuze ishyirwa mubuhanga bwa LED. Kuva icyo gihe, yagutse mubice byinshi bya semiconductor porogaramu kubera ibyiza bifatika bifatika. Iyi mitungo igaragara muburyo bwagutse bwo gukoresha no hanze yinganda. Hamwe n’amategeko ya Moore asa nkaho agera ku mbibi, ibigo byinshi biri mu nganda zikoresha amashanyarazi bireba karibide ya silicon nkibikoresho bya semiconductor ejo hazaza. SiC irashobora kubyazwa umusaruro hakoreshejwe polytypes nyinshi za SiC, nubwo munganda ziciriritse, insimburangingo nyinshi ni 4H-SiC, hamwe na 6H- ntibisanzwe nkuko isoko rya SiC ryakuze. Iyo uvuze kuri 4H- na 6H- silicon karbide, H igereranya imiterere ya kasitori. Umubare ugereranya urutonde rwa atome muburyo bwa kristu, ibi byasobanuwe mubishushanyo mbonera bya SVM hepfo. Ibyiza bya Carbide ya Silicon Hariho ibyiza byinshi byo gukoresha karibone ya silicon hejuru ya silicon gakondo. Kimwe mu byiza byingenzi byibi bikoresho ni ubukana bwacyo. Ibi bitanga ibikoresho byinshi byiza, mumuvuduko mwinshi, ubushyuhe bwo hejuru na / cyangwa amashanyarazi menshi. Wafers ya silicon karbide ifite ubushyuhe bwinshi, bivuze ko ishobora kwimura ubushyuhe kuva kumurongo umwe ujya kurindi riba. Ibi bitezimbere amashanyarazi kandi amaherezo ya miniaturizasiya, imwe mumigambi isanzwe yo guhindukira kuri wafers ya SiC. Ubushobozi bwubushyuhe SiC substrates nayo ifite coefficient nkeya yo kwagura ubushyuhe. Kwiyongera k'ubushyuhe nubunini nicyerekezo ibintu byaguka cyangwa amasezerano nkuko ashyushye cyangwa akonje. Ibisobanuro bikunze kugaragara ni urubura, nubwo bitwara bitandukanye nibyuma byinshi, bikaguka uko bikonje kandi bikagabanuka uko bishyushye. Coefficient nkeya ya Silicon yo kwagura ubushyuhe bivuze ko idahinduka cyane mubunini cyangwa mumiterere kuko yashyutswe cyangwa ikonje, ibyo bigatuma ikora neza kugirango ihuze ibikoresho bito no gupakira transistor nyinshi kuri chip imwe. Iyindi nyungu nyamukuru yiyi substrate ni ukurwanya kwinshi kwumuriro. Ibi bivuze ko bafite ubushobozi bwo guhindura ubushyuhe byihuse batabanje kumeneka cyangwa guturika. Ibi bitanga inyungu isobanutse mugihe uhimba ibikoresho kuko nibindi bimenyetso biranga ubukana butezimbere ubuzima bwimikorere ya carbide ya silicon ugereranije na silicon gakondo. Hejuru yubushobozi bwayo bwumuriro, ni substrate iramba cyane kandi ntabwo ikora na acide, alkalis cyangwa umunyu ushongeshejwe mubushyuhe bugera kuri 800 ° C. Ibi bitanga insimburangingo mubikorwa byabo kandi bikanafasha mubushobozi bwabo bwo gukora silicon nyinshi mubisabwa byinshi. Imbaraga zayo mubushyuhe bwo hejuru nayo ituma ikora neza mubushyuhe burenga 1600 ° C. Ibi bituma iba substrate ikwiye hafi yubushyuhe bwo hejuru.