SiC – Karubide ya Silikoli

Karubide ya silikoni yavumbuwe mu 1893 nk'igikoresho cyo gusya amapine n'amaferi y'imodoka. Hagati mu kinyejana cya 20, ikoreshwa rya SiC wafer ryarushijeho kwiyongera mu ikoranabuhanga rya LED. Kuva icyo gihe, ryagiye rikwirakwira mu bikorwa byinshi bya semiconductor bitewe n'imiterere yaryo myiza. Iyi miterere igaragara mu mikoreshereze yayo myinshi mu nganda za semiconductor no hanze yazo. Kubera ko itegeko rya Moore risa n'aho rigeze ku mupaka waryo, amasosiyete menshi mu nganda za semiconductor arimo gushaka karubide ya silikoni nk'ibikoresho bya semiconductor by'ejo hazaza. SiC ishobora gukorwa hakoreshejwe ubwoko bwinshi bwa SiC, nubwo mu nganda za semiconductor, substrates nyinshi ziba 4H-SiC, naho 6H- igenda igabanuka uko isoko rya SiC ryagiye rikura. Iyo havuzwe karubide ya silikoni ya 4H- na 6H-, H ihagarariye imiterere ya lattice ya crystal. Umubare ugaragaza urukurikirane rw'atome mu miterere ya crystal, ibi bivugwa mu mbonerahamwe y'ubushobozi bwa SVM iri hepfo. Ibyiza byo Gukomera kwa Karubide ya silikoni Hari inyungu nyinshi zo gukoresha karubide ya silikoni kuruta substrates za silikoni zisanzwe. Imwe mu nyungu zikomeye z'iki gikoresho ni ubukana bwacyo. Ibi biha ibikoresho ibyiza byinshi, mu muvuduko mwinshi, ubushyuhe bwinshi cyangwa ingufu nyinshi. Wafer za silicon carbide zifite ubushobozi bwo gutwara ubushyuhe bwinshi, bivuze ko zishobora kohereza ubushyuhe kuva ahantu hamwe ujya ahandi. Ibi binoza ubushobozi bwazo bwo gutwara amashanyarazi ndetse bikagera no ku buryo buto, imwe mu ntego zisanzwe zo guhindura wafer za SiC. Ubushobozi bw'ubushyuhe Uduce twa SiC dufite ubushobozi buke bwo kwagura ubushyuhe. Kwagura ubushyuhe ni ingano n'icyerekezo ibikoresho byaguka cyangwa bigacika uko bishyuha cyangwa bikonje. Ibisobanuro bikunze kugaragara ni urubura, nubwo bigira ingaruka zitandukanye n'ibyuma byinshi, bikaguka uko bikonje kandi bigagabanuka uko bishyuha. Ubushobozi buke bwa silicon carbide bwo kwagura ubushyuhe bivuze ko idahinduka cyane mu bunini cyangwa imiterere iyo ishyushye cyangwa ikonje, ibi bigatuma iba nziza cyane mu gushyira mu bikoresho bito no gupakira transistors nyinshi kuri chip imwe. Indi nyungu ikomeye y'izi substrate ni ubudahangarwa bwazo bwinshi ku bushyuhe. Ibi bivuze ko zifite ubushobozi bwo guhindura ubushyuhe vuba nta kuvunika cyangwa gucika. Ibi bitanga inyungu igaragara mu gukora ibikoresho kuko ari ikindi kintu kiranga gukomera kwa silicon carbide ugereranije na silicon isanzwe. Uretse ubushobozi bwayo bwo gushyuha, ni substrate iramba cyane kandi ntigira ingaruka ku binyabutabire, alkali cyangwa umunyu washongeshejwe ku bushyuhe bugera kuri 800°C. Ibi biha izi substrate ubushobozi bwo gukoresha neza kandi bikanafasha ubushobozi bwazo bwo gukora silicon nyinshi mu bikorwa byinshi. Ingufu zayo ku bushyuhe bwinshi kandi ituma ikora neza ku bushyuhe burenze 1600°C. Ibi bituma iba substrate ikwiriye gukoreshwa hafi ya hose mu bushyuhe bwinshi.