SiC - Silicon Carbide

Silicon carbide tau pom nyob rau hauv xyoo 1893 ua ib qho khoom siv rau kev sib tsoo log thiab lub tsheb nres. Kwv yees li nruab nrab ntawm lub xyoo pua 20th, SiC wafer siv tau loj hlob mus rau hauv LED technology. Txij thaum ntawd los, nws tau nthuav dav mus rau hauv ntau daim ntawv thov semiconductor vim nws cov khoom zoo. Cov khoom no pom tseeb hauv nws ntau yam kev siv hauv thiab sab nraum kev lag luam semiconductor. Nrog Moore's Law zoo li mus txog nws qhov txwv, ntau lub tuam txhab hauv kev lag luam semiconductor tab tom nrhiav rau silicon carbide ua cov khoom siv semiconductor ntawm yav tom ntej. SiC tuaj yeem tsim tau siv ntau hom polytypes ntawm SiC, txawm hais tias hauv kev lag luam semiconductor, feem ntau cov substrates yog 4H-SiC, nrog 6H- dhau los ua tsawg dua li kev lag luam SiC tau loj hlob. Thaum xa mus rau 4H- thiab 6H- silicon carbide, H sawv cev rau cov qauv ntawm cov crystal lattice. Tus lej sawv cev rau cov kab ke stacking ntawm cov atoms hauv cov qauv siv lead ua, qhov no tau piav qhia hauv daim ntawv qhia peev xwm SVM hauv qab no. Cov txiaj ntsig ntawm Silicon Carbide Hardness Muaj ntau qhov zoo rau kev siv silicon carbide dhau ntawm cov silicon substrates ib txwm muaj. Ib qho ntawm cov txiaj ntsig tseem ceeb ntawm cov khoom siv no yog nws qhov nyuaj. Qhov no muab ntau yam zoo rau cov khoom siv, hauv kev siv ceev ceev, kub siab thiab / lossis hluav taws xob siab. Silicon carbide wafers muaj cov thermal conductivity siab, uas txhais tau tias lawv tuaj yeem hloov cua sov los ntawm ib qho mus rau lwm qhov zoo. Qhov no txhim kho nws cov hluav taws xob conductivity thiab thaum kawg miniaturization, ib qho ntawm cov hom phiaj ntawm kev hloov mus rau SiC wafers. Thermal peev xwm SiC substrates kuj muaj cov coefficient qis rau thermal expansion. Thermal expansion yog qhov ntau thiab kev taw qhia uas cov khoom siv nthuav dav lossis cog lus thaum nws kub lossis txias. Qhov kev piav qhia feem ntau yog dej khov, txawm hais tias nws ua txawv ntawm feem ntau cov hlau, nthuav dav thaum nws txias thiab ntsws thaum nws kub. Silicon carbide tus coefficient qis rau thermal expansion txhais tau tias nws tsis hloov pauv loj hauv qhov loj me lossis cov duab thaum nws kub lossis txias, uas ua rau nws zoo meej rau kev haum rau hauv cov khoom siv me me thiab ntim ntau transistors rau ntawm ib lub chip. Lwm qhov zoo ntawm cov substrates no yog lawv qhov kev tiv thaiv siab rau thermal shock. Qhov no txhais tau tias lawv muaj peev xwm hloov qhov kub sai sai yam tsis tawg lossis tawg. Qhov no tsim kom muaj qhov zoo meej thaum tsim cov khoom siv vim nws yog lwm yam ntxwv toughness uas txhim kho lub neej thiab kev ua tau zoo ntawm silicon carbide piv rau cov silicon ib txwm muaj. Ntxiv rau nws cov peev xwm ua kom sov, nws yog ib qho khoom siv ruaj khov heev thiab tsis ua rau cov kua qaub, alkalis lossis cov ntsev yaj ntawm qhov kub txog li 800 ° C. Qhov no ua rau cov khoom siv no muaj peev xwm ua tau ntau yam hauv lawv daim ntawv thov thiab pab lawv lub peev xwm ua tau zoo dua li cov silicon hauv ntau daim ntawv thov. Nws lub zog ntawm qhov kub siab kuj tso cai rau nws ua haujlwm tau zoo ntawm qhov kub siab tshaj 1600 ° C. Qhov no ua rau nws yog ib qho khoom siv tsim nyog rau txhua daim ntawv thov kub siab.