Silicon carbide inapezeka mu 1893 ngati chida chopangira mawilo ndi mabuleki a magalimoto. Pakati pa zaka za m'ma 1900, kugwiritsa ntchito SiC wafer kunakula kwambiri muukadaulo wa LED. Kuyambira pamenepo, yakula kukhala ntchito zambiri za semiconductor chifukwa cha makhalidwe ake abwino. Makhalidwe amenewa akuwonekera bwino m'njira zosiyanasiyana zomwe amagwiritsidwa ntchito mkati ndi kunja kwa makampani a semiconductor. Popeza lamulo la Moore likuoneka kuti lafika malire ake, makampani ambiri mkati mwa makampani a semiconductor akuyang'ana silicon carbide ngati zinthu za semiconductor zamtsogolo. SiC ikhoza kupangidwa pogwiritsa ntchito mitundu ingapo ya SiC, ngakhale mkati mwa makampani a semiconductor, zinthu zambiri zimakhala 4H-SiC, ndipo 6H- ikuchepa kwambiri pamene msika wa SiC wakula. Ponena za 4H- ndi 6H-silicon carbide, H imayimira kapangidwe ka kristalo lattice. Nambalayi imayimira kutsatizana kwa maatomu mkati mwa kapangidwe ka kristalo, izi zafotokozedwa mu tchati cha SVM pansipa. Ubwino wa Kulimba kwa Silicon Carbide Pali maubwino ambiri ogwiritsira ntchito silicon carbide kuposa zinthu zachikhalidwe za silicon. Chimodzi mwa zabwino zazikulu za chipangizochi ndi kuuma kwake. Izi zimapatsa chipangizocho ubwino wambiri, pakugwiritsa ntchito liwiro lapamwamba, kutentha kwambiri komanso/kapena magetsi ambiri. Ma wafer a silicon carbide ali ndi kutentha kwakukulu, zomwe zikutanthauza kuti amatha kusamutsa kutentha kuchokera pamalo ena kupita ku chitsime china. Izi zimathandizira kuyendetsa bwino magetsi ake komanso kupangitsa kuti zikhale zochepa, chimodzi mwa zolinga zodziwika bwino zosinthira ku ma wafer a SiC. Mphamvu ya kutentha Ma substrate a SiC alinso ndi coefficient yotsika yokulitsa kutentha. Kukula kwa kutentha ndi kuchuluka ndi komwe chinthucho chimakulira kapena kuchepetsedwa pamene chikutentha kapena kuzizira. Kufotokozera kofala kwambiri ndi ayezi, ngakhale kuti amachita mosiyana ndi zitsulo zambiri, kukula pamene chikuzizira ndikuchepa pamene chikutentha. Coefficient yotsika ya Silicon carbide yokulitsa kutentha imatanthauza kuti sichisintha kwambiri kukula kapena mawonekedwe pamene chikutenthedwa kapena kuzizira, zomwe zimapangitsa kuti chikhale choyenera kuyikidwa m'zida zazing'ono ndikuyika ma transistors ambiri pa chip imodzi. Ubwino wina waukulu wa ma substrate awa ndi kukana kwawo kutentha kwambiri. Izi zikutanthauza kuti amatha kusintha kutentha mwachangu popanda kusweka kapena kusweka. Izi zimapangitsa kuti zikhale bwino popanga zipangizo chifukwa ndi mphamvu ina yomwe imawonjezera moyo ndi magwiridwe antchito a silicon carbide poyerekeza ndi silicon yachikhalidwe. Kuphatikiza pa mphamvu zake zotenthetsera, ndi substrate yolimba kwambiri ndipo sichita ndi ma acid, alkalis kapena mchere wosungunuka pa kutentha mpaka 800°C. Izi zimapangitsa kuti substrate izi zikhale zosinthasintha pakugwiritsa ntchito kwawo ndipo zimathandizanso kuti zigwire bwino ntchito kuposa silicon yamtunduwu pakugwiritsa ntchito zinthu zambiri. Mphamvu yake pa kutentha kwambiri imathandizanso kuti igwire ntchito mosamala pa kutentha kopitilira 1600°C. Izi zimapangitsa kuti ikhale substrate yoyenera kugwiritsidwa ntchito pa kutentha kulikonse.
Nthawi yotumizira: Julayi-09-2019