Ezweni elinembayo lemboni yesimanje, ukuguga okuncane kwezinto zokwakha kuvame ukunquma ukusebenza kokugcina kwemishini.I-silicone carbide ceramics, ngezakhiwo zabo ezibonakalayo eziyingqayizivele, ziba "umqaphi oqinile" emkhakheni wokukhiqiza osezingeni eliphezulu. Ukumelana okuhlukile kwe-ceramic material ethuthukisiwe ukuchaza kabusha izindinganiso zokusebenza zemishini enembayo.
1. Ikhodi yesayensi eqinile
I-elastic modulus yento efana nerula yokulinganisa ukuqina, inquma ngokuqondile ikhono layo lokumelana nokuguquka ngaphansi kwengcindezi. I-elastic modulus ye-silicon carbide ceramics ingaphezu kokuphindwe kathathu kunensimbi evamile, okwenza ifane nohlaka lwensimbi lokuqinisa insimbi ezakhiweni lapho ingaphansi kwengcindezi - ngisho nangaphansi komthwalo wamandla aphezulu wemishini esindayo, ukuguqulwa kungu-1/4 kuphela wezinto zensimbi.
Lokhu kuqina okungavamile kuvela kusakhiwo sebhondi eqinile ye-covalent ngaphakathi kwempahla. I-athomu yekhabhoni ngayinye ixhunywe ngokuqinile kuma-athomu amane e-silicon ngokusebenzisana okuqinile, kwakha isakhiwo sekristalu yenethiwekhi enezinhlangothi ezintathu. Lapho amandla angaphandle esebenza, lesi sakhiwo se-lattice esizinzile singahlakaza ngempumelelo ukucindezeleka nokulawula ukuguquguquka ngaphakathi kwebanga le-micrometer. Emikhakheni efana nezingxenyekazi ze-optical ezinembayo kanye nemishini yokukhiqiza i-semiconductor engakubekezeleli nhlobo ukuguqulwa, lesi sici siba ukhiye wokuqinisekisa ukunemba.
2, Ifilosofi yezinto ezihlanganisa ukuqina nokuvumelana nezimo
I-Silicon carbide ceramics ayibonisi nje kuphela ukuqina okuphezulu, kodwa futhi inokusebenza okumangalisayo okubanzi:
1. Iqinile kodwa ayishwabanisi: Amandla ayo okugoba adlula awensimbi ekhethekile, futhi ngisho nangaphansi kwengcindezi elingana neyendlovu endala emi ngonyawo olulodwa (cishe u-400MPa), isengagcina ubuqotho besakhiwo. Le nhlanganisela yamandla aphezulu kanye nokuqina okuphezulu ixazulula inkinga yemboni yezitsha zobumba zendabuko ezintekenteke.
2. Ukuzinza kokushisa njengentaba: I-coefficient yokunwetshwa kwe-thermal yento esebenzayo ingu-1/4 kuphela waleyo yensimbi, futhi ukushintshashintsha kosayizi kuncane kumehluko wezinga lokushisa ongu-200 ℃. Ihlanganiswe nokuhamba kwayo okuhle kakhulu kwe-thermal, ingakwazi ukulinganisa ngokushesha ama-gradients okushisa futhi igweme ukuqoqwa kokuguqulwa okubangelwa ukucindezeleka okushisayo.
3. I-non deformation: Ngaphansi kwengcindezi eqhubekayo, izinga lokunyuka kwe-silicon carbide lingama-oda amabili obukhulu aphansi kunalelo lezinto zensimbi. Lokhu kusho ukuthi noma ngabe ingaphansi komthwalo ofanayo iminyaka eyishumi, izinguquko zayo zomumo zisengalawulwa ngaphansi komkhawulo wokuthola ithuluzi.
3. Inani lezobuchwepheshe eliqinile
Leli khono elimangalisayo lokumelana ne-deformation lidala amathuba amasha ezimboni:
Kumasistimu okubona ngesathelayithi, qinisekisa ukuthi isibuko sigcina izinga le-nanometer flatness ngaphansi komehluko omkhulu wokushisa emkhathini.
Gcina ukunemba kokuma kwe-sub micron yesikhulumi esinyakazayo semishini yokucubungula i-wafer ye-semiconductor ngesikhathi sokusebenza ngesivinini esikhulu.
Gcina ukusimama kwejiyomethri kwesakhiwo esivaliwe segumbi lokucindezela lemishini yokuhlola ekujuleni kolwandle ngisho nangaphansi komfutho wamanzi wezinga lekhilomitha.
Siguqula le nzuzo yezinto ezibonakalayo ibe ukuncintisana kwezobuchwepheshe ngezinqubo ezintsha: ukwamukela izindlela ezithuthukisiwe zokukhiqiza ukuze sithuthukise ukuminyana kwezinto ezibonakalayo; Ngokusebenzisa ubuchwepheshe obunamalungelo obunikazi obuthuthukisiwe, ukuqina kuyathuthukiswa ngenkathi kugcinwa ukuqina okuphakeme kakhulu. Iqoqo ngalinye lezinto ezidingekayo lihlolwa ngokuqinile ukuze kuqinisekiswe ukuthi imikhiqizo ethunyelwe iyahlangabezana noma idlule izimfuneko zamakhasimende.
Namuhla, njengoba ukukhiqizwa okunembayo kusondela esikalini se-nanoscale, izitsha zobumba ze-silicon carbide zihumusha ukuphishekela imboni yesimanje “ngefilosofi yayo eqinile” - isebenzisa ukuzinza okuphelele kwezinto ukusekela amathuba angapheli okukhiqiza. Lokhu kuphumelela kwezobuchwepheshe, okuhlanganisa ukuhlakanipha kwesayensi yezinto ezibonakalayo, kuzoqhubeka nokufaka umfutho omusha “wokusebenzisa ukuqina ukuze unqobe ukuguquguquka” ekwenzeni imishini esezingeni eliphezulu.
Isikhathi sokuthumela: Apr-29-2025